Munzur ÜniversitesiMunzur ÜniversitesiAçık Erişim Arşivi · RDL Open

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  • MakaleYalnız künye2017Scopus SJRQ1
    Hough Transform as a quality test tool for electron beam lithography

    Göktaş, Oktay; Işık Göktaş, Nebile

    In this study, we use Hough Transform as a test tool to investigate the quality of the electron beam lithography. A graphene like thin film of metal layer is fabricated on top of GaAs substrate by electron beam lithography. Hough Transform is applied to the SEM images of the fabricated pattern and the quality of the lithography process is quantitatively investigated. All the existing critical dimensional measurements on the SEM images which would otherwise take several days are done in a single step. The power and potential use of Hough Transform for the SEM image inspection especially for the quality test of nano-patterning processes is demonstrated.

    AtıfScopus3WoS3OpenAlex4
    ScopusWeb of Scienceİncele
  • MakaleAçık Erişim2015Scopus SJRQ2
    Electrical characterization of metal/diamond-like carbon/inorganic semiconductor MIS Schottky barrier diodes

    Basman, N.; Aslan, N.; Uzun, O.; Cankaya, G.; Kolemen, U.

    AtıfOpenAlex39
    Web of Scienceİncele
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creativeworkseries.issn0167-9317
dc.date.accessioned2026-10-28T14:57:13.872142464Z
dc.date.available2026-10-28T14:57:13.872142464Z
dc.identifier.urihttps://rdlopen.rawdatalibrary.net/r/munzur/3863
dc.publisherElsevier B.V.
dc.rightsinfo:eu-repo/semantics/openAccess
dc.titleMicroelectronic Engineering